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ALD Valve
A device that repeatedly supplies stable gas to semiconductor ALD process equipment
Fast response speed, high temperature environment, and high durability by opening and closing through air supply
Specification
Item | Specification | |||
1/4” | 1/2” | IGS 1.5 | ||
Operating Pressure | 0.4 ~ 0.6Mpa | |||
Temperature Limit | < 200℃ with thermal isolator | |||
Leakage | < 5.0x10-9 mbar·L/S | |||
Cycle Life | > 40 million cycles | |||
Cv | 0.32 ±3% | 0.62 ±3% | ||
Valve Actuation Speed (@Air Tube 200mm) | Open Response Time < 25msec Close Response Time < 35msec | Open Response Time < 40msec Close Response Time < 45msec | ||
Size | Cylinder | ∅ 38 | ∅ 38 | ∅ 38 |
Valve Length | 113 | 121 | 107 | |
| Body | □26 | □31 | □38 | |
㈜파인솔루션 ㅣ 사업자번호 : 340-86-00014 ㅣ 대표이사 : 이기연
본사 : 경기도 평택시 서탄면 수월암2길 88-12 (17704) ㅣTEL : 031-663-9556 ㅣ FAX : 031-663-9557
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