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APC (Auto Pressure Controller)
A device that controls chamber pressure in a downstream manner in vacuum equipment such as semiconductor or display CVD or ALD Controller all-in-one & Compact, customizable
Specification
Item | Specification | |
| Size | NW40, 50, 63, 80, 100, 160, 200 | |
External Leakage | 1X10-9 cc/sec He | |
User Interface | RS232, E-Cat | |
Offline Monitoring | Pressure, Position Monitoring (OLED) | |
Material | Flange | Al6061 or SUS316L |
Flapper | Al6061 or SUS316L | |
Sealing | Sealing or Non Sealing | |
Temp | Flange | < 180℃ |
Motor & Elec. | < 50℃ (@ Cooling Fan) | |
Control | Control type | Smart & GRC(Gain & Ramp) - Smart: Learning Function - GRC: Auto tuning Function |
Speed | ≤ 200msec (Flapper Open to Close) | |
Resolution | 0~10V(or 5V) 16bit A/D Convert | |
Flapper Cal. | Flapper Home 수평 <±0.1mm | |
PID multi Set | Set Point 1,2,3,4,5 | |
| Motor | Type | Direct Drive Step Motor (None Gear Box) With Encoder |
Accuracy | < ±0.14% | |
Resolution | > 1/5000 | |
Power Rating | < 3.0A @24Vdc | |
| RPM | > 2500rpm | |
| Certification | CE | |
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