제품소개
최고 품질의 제품과 서비스, 변화와 혁신
HOT-KIT
Applies to semiconductor/display gas line for instantaneous heating of gas Particles are reduced due to increased reactivity and suppression of mist generation due to increased gas heat energy Product can be developed according to customer requirements
Specification
Item | Specification |
| Gas Temp | 140℃±10℃(@Heater temp 250℃) |
Body Temp | <90℃ |
Particle | <3ea (@0.3㎛) |
Withstand Voltage | <10mA (250℃, AC1.5KV, 60sec) |
Heater Resistance | 235Ω ±15Ω |
Leak check | <1.0x10-8(Torr.l/s) |
Set Temp | ~450℃ |
Pressure | ATM ~ Vacuum(<10torr) |
Gas Flow | 1000~20000sccm |
Performance Test
Hot Kit Test (Gas Flow Rate vs Gas Temp) | ||||
Hot Kit Temp | 200℃ | 300℃ | ||
Gas Flow | 20000sccm | 25000sccm | 20000sccm | 25000sccm |
Gas Out Temp | 160.7℃ | 163℃ | 234.2℃ | 238.4℃ |
Gas Temp Comparison (Hot Kit >> Jacket Heater)
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