제품소개

최고 품질의 제품과 서비스, 변화와 혁신

Z-Motion


Description

Submodule unit development/design/manufacturing/test that requires moving in semiconductor & display facilities, and Issue Zero for all delivered products to ensure facility safety and reproducibility

Specification

Item

Specification

Main Features

High Speed & Low Vibration

High repeatability accuracy

Hardware

Hardware Spec.

Actuator: THK KR2602 (Precision grade) – 3 Axis

 - Lead: 1mm

 - Servo Motor: YASKAWA / SGM7J-01AFD6C

 - Servo Pack: SGD7S-R90A20A

 - Sensor: Photo Micro Sensor / Home, ±Limit

Motion Spec.

(Customer spec.)

Z-Motion (3-Axis Synchronous drive)

Stroke: 68.5mm

Motion Control

High performance Stand-alone Motion Controller

 - Maker: YASKAWA

 - Model: MP3300

Closed loop PID Control

Real-time PID Auto gaining function

Soft up/down moving position limit

Normal Torque Load: within 50%(Axis) on Vacuum

Repeatability Accuracy: <20㎛

Interface

Motion Control

Ethernet (RJ-45)

External I/O Port

D-Sub 25Pin (Male)

Weight

Module

10kg (1Side)

Control Box

22kg

Power

AC200~230V 1P 50/60Hz, 700W

㈜파인솔루션 ㅣ 사업자번호 : 340-86-00014 ㅣ 대표이사 : 이기연

본사 : 경기도 평택시 서탄면 수월암2길 88-12 (17704) ㅣTEL : 031-663-9556 ㅣ FAX : 031-663-9557    

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