제품소개
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Z-Motion
Submodule unit development/design/manufacturing/test that requires moving in semiconductor & display facilities, and Issue Zero for all delivered products to ensure facility safety and reproducibility
Specification
Item | Specification | |
Main Features | High Speed & Low Vibration | |
High repeatability accuracy | ||
Hardware | Hardware Spec. | Actuator: THK KR2602 (Precision grade) – 3 Axis |
- Lead: 1mm | ||
- Servo Motor: YASKAWA / SGM7J-01AFD6C | ||
- Servo Pack: SGD7S-R90A20A | ||
- Sensor: Photo Micro Sensor / Home, ±Limit | ||
Motion Spec. (Customer spec.) | Z-Motion (3-Axis Synchronous drive) | |
Stroke: 68.5mm | ||
Motion Control | High performance Stand-alone Motion Controller | |
- Maker: YASKAWA | ||
- Model: MP3300 | ||
Closed loop PID Control | ||
Real-time PID Auto gaining function | ||
Soft up/down moving position limit | ||
Normal Torque Load: within 50%(Axis) on Vacuum | ||
Repeatability Accuracy: <20㎛ | ||
Interface | Motion Control | Ethernet (RJ-45) |
External I/O Port | D-Sub 25Pin (Male) | |
Weight | Module | 10kg (1Side) |
Control Box | 22kg | |
Power | AC200~230V 1P 50/60Hz, 700W |
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